au.\*:("PHELPS, G. J")
Results 1 to 1 of 1
Selection :
Step bunching fabrication constraints in silicon carbidePHELPS, G. J; WRIGHT, N. G; CHESTER, E. G et al.Semiconductor science and technology. 2002, Vol 17, Num 5, pp L17-L21, issn 0268-1242Article